Comparison of SEM-EDS, Micro-XRF and Confocal Micro-XRF for Electric Device Analysis

In general, scanning electron microscope with energy dispersive X-ray spectroscopy (SEM-EDS) has been used in laboratories or factories for the analysis of the element distribution in the samples such as electric components. However, SEM-EDS requires sample preparation, which usually is difficult and takes a long time. On the other hand, micro X-ray fluorescence (mu-XRF) can be utilized for the elemental analysis underneath the surface of the samples thanks to the high penetrating power of X-rays. Furthermore, the depth distribution of elements in the samples can be acquired by the latest confocal XRF. In this paper, the information regarding the depth direction in small electrical and electronic components is compared for SEM-EDS, mu-XRF and the confocal XRF. At the same time, we give a brief report on not only the development of confocal XRF equipment but also some ideas as to the depth profile of the samples.