PREPARATION OF ZNO THIN-FILM TRANSDUCERS BY VAPOR TRANSPORT

被引：24

作者：

BELT, RF

FLORIO, GC

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来源：

JOURNAL OF APPLIED PHYSICS | 1968年 / 39卷 / 11期

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D O I：

10.1063/1.1655944

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：5215 / &

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[10] PREPARATION OF ZNO THIN FILMS BY SPUTTERING OF COMPOUND IN OXYGEN AND ARGON - (0.1 TO 10 MU THICK - SUBSTRATES - SAPPHIRE PYREX GLASS GOLD PLATE - ULTRASONICS - PIEZOELECTRICS - TRANSDUCERS - E)
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