REACTION BETWEEN TETRA-TERT-BUTOXYZIRCONIUM AND AL(110)-OH IN UHV

被引：17

作者：

MILLER, JB ^{[1
]}

BERNASEK, SL ^{[1
]}

SCHWARTZ, J ^{[1
]}

机构：

[1] PRINCETON UNIV,DEPT CHEM,PRINCETON,NJ 08544

来源：

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY | 1995年 / 117卷 / 14期

关键词：

D O I：

10.1021/ja00119a019

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Single crystal A1(110) was hydroxylated in UHV to give a disordered overlayer. Protolytically labile tetraneopentylzirconium did not react with hydroxylated A1(110) in UHV, which was interpreted through a mechanistic proposal for proton-transfer-based surface chemical modification. According to this proposal, a zirconium alkoxide, although less thermodynamically basic than a zirconium alkyl, could be a kinetically viable substrate for proton-transfer-based organometallic chemical vapor deposition (MOCVD) in UHV, and tetra-tert-butoxyzirconium did react with hydroxylated A1(110) to give a surface bound di-tert-butoxyzirconium species. The deposition reaction was readily studied by HREELS, XPS, and AES.

引用

页码：4037 / 4041

页数：5

共 13 条

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