LASER ASSISTED RECRYSTALLIZATION OF SILICON FILMS ON AMORPHOUS SUBSTRATUM

被引:0
|
作者
LUTHY, W
AFFOLTER, K
SIREGAR, MRT
ROULET, ME
DUTOIT, M
机构
[1] CTR ELECTR HORLOGER SA,CH-2000 NEUCHATEL,SWITZERLAND
[2] UNIV BERN,INST ANGEW PHYS,CH-3012 BERN,SWITZERLAND
来源
HELVETICA PHYSICA ACTA | 1980年 / 53卷 / 02期
关键词
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
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页码:278 / 278
页数:1
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