BEAM INVESTIGATIONS AT A MULTICUSP ION-SOURCE

被引：1

作者：

VOLK, K ^{[1
]}

KLEIN, H ^{[1
]}

LEUNG, KN ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 04期

关键词：

D O I：

10.1063/1.1142852

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In cooperation with the Lawrence Berkeley Laboratory, a multicusp ion source has been investigated. The goal of these investigations is to generate a nearly pure atomic nitrogen (N+) ion beam. To achieve this, the discharge chamber is divided into two parts of different plasma parameters by means of a filter magnetic field. As beam diagnostics, a bending magnet and a faraday cup have been used. Measurements of the beam current density and the ion composition for a wide range of discharge conditions have been performed. By using a Langmuir probe, we have performed measurements of electron temperature and electron density.

引用

页码：2607 / 2609

页数：3