共 50 条
- [2] The direct measurement of linewidth using an atomic force microscope Measurement Techniques, 2008, 51 : 470 - 474
- [6] MICROPATTERN MEASUREMENT WITH AN ATOMIC FORCE MICROSCOPE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02): : 666 - 669
- [9] CMUT cavity pressure measurement using an atomic force microscope Microsystem Technologies, 2024, 30 : 343 - 352
- [10] CMUT cavity pressure measurement using an atomic force microscope MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2024, 30 (03): : 343 - 352