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- [11] MODELING OF INDUCTIVELY COUPLED PLASMA SOURCE WITH ARGON/OXYGEN GAS MIXTURE FOR ETCHING 2015 42ND IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCES (ICOPS), 2015,
- [13] Argon plasma uniformity in a low-pressure inductively coupled plasma source with planar coil IEEE Int Conf Plasma Sci, (127):
- [16] INDUCTIVELY COUPLED PLASMA EMISSION SPECTROCHEMICAL ANALYSIS BY EXTRACTION METHOD OF ORGANIC-SOLVENT TETSU TO HAGANE-JOURNAL OF THE IRON AND STEEL INSTITUTE OF JAPAN, 1985, 71 : 1208 - 1208
- [17] RECENT ADVANCES IN EMISSION-SPECTROSCOPY - INDUCTIVELY COUPLED PLASMA DISCHARGES FOR SPECTROCHEMICAL ANALYSIS CRC CRITICAL REVIEWS IN ANALYTICAL CHEMISTRY, 1978, 7 (03): : 203 - 296
- [19] USE OF AN INDUCTIVELY COUPLED ARGON AND XENON PLASMA IN SPECTRAL-ANALYSIS SOVIET JOURNAL OF OPTICAL TECHNOLOGY, 1984, 51 (05): : 308 - 310
- [20] Measurements of pulsed-power modulated argon plasmas in an inductively coupled plasma source JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (02): : 391 - 397