USE OF OXYGEN-DOPED ALXGA1-XAS FOR INSULATING LAYER IN MIS STRUCTURES

被引：20
作者：
CASEY, HC
CHO, AY
NICOLLIAN, EH
机构：
来源：
APPLIED PHYSICS LETTERS | 1978年 / 32卷 / 10期
关键词：
D O I：
10.1063/1.89853
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：678 / 679
页数：2
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