STRESS DEPENDENCE OF REACTIVELY SPUTTERED ALUMINUM NITRIDE THIN-FILMS ON SPUTTERING PARAMETERS

被引：75

作者：

HUFFMAN, GL

FAHNLINE, DE

MESSIER, R

PILIONE, LJ

机构：

[1] PENN STATE UNIV,DEPT PHYS,ALTOONA,PA 16603

[2] PENN STATE UNIV,DEPT ENGN SCI & MECH,UNIVERSITY PK,PA 16802

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.575923

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2252 / 2255

页数：4

共 13 条

[1] THE DEPENDENCE OF ALUMINUM NITRIDE FILM CRYSTALLOGRAPHY ON SPUTTERING PLASMA COMPOSITION [J].

AITA, CR ;

GAWLAK, CJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1983, 1 (02) :403-406

[2] STRESS MEASUREMENT IN SPUTTERED COPPER-FILMS ON FLEXIBLE POLYIMIDE SUBSTRATES [J].

ENTENBERG, A ;

LINDBERG, V ;

FLETCHER, K ;

GATESMAN, A ;

HORWATH, RS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (06) :3373-3377

[3] REACTIVELY SPUTTERED AIN FILMS FOR GAAS ANNEALING CAPS [J].

ESTE, G ;

SURRIDGE, R ;

WESTWOOD, WD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :989-992

[4] STRESS-CONTROL IN REACTIVELY SPUTTERED AIN AND TIN FILMS [J].

ESTE, G ;

WESTWOOD, WD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :1892-1897

[5] SYNTHESIS OF COMPOUND THIN-FILMS BY DUAL ION-BEAM DEPOSITION .2. PROPERTIES OF ALUMINUM-NITROGEN FILMS [J].

HENTZELL, HTG ;

HARPER, JME ;

CUOMO, JJ .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) :556-563

[6] INTERNAL-STRESSES IN SPUTTERED CHROMIUM [J].

HOFFMAN, DW ;

THORNTON, JA .

THIN SOLID FILMS, 1977, 40 (JAN) :355-363

[7] COMPRESSIVE STRESS TRANSITION IN AL, V, ZR, NB AND W METAL-FILMS SPUTTERED AT LOW WORKING PRESSURES [J].

HOFFMAN, DW ;

THORNTON, JA .

THIN SOLID FILMS, 1977, 45 (02) :387-396

[8] INTERNAL-STRESSES IN CR, MO, TA, AND PT FILMS DEPOSITED BY SPUTTERING FROM A PLANAR MAGNETRON SOURCE [J].

HOFFMAN, DW ;

THORNTON, JA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :355-358

[9] ALN THIN-FILMS WITH CONTROLLED CRYSTALLOGRAPHIC ORIENTATIONS AND THEIR MICROSTRUCTURE [J].

OHUCHI, FS ;

RUSSELL, PE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :1630-1634

[10]

SOMEKH RE, 1984, J VAC SCI TECHNOL A, V2, P1285, DOI 10.1116/1.572396

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