MODULATED ELLIPSOMETER FOR STUDYING THIN-FILM OPTICAL PROPERTIES AND SURFACE DYNAMICS

被引：77
作者：
JASPERSON, SN
BURGE, DK
OHANDLEY, RC
机构：
[1] WORCESTER POLYTECH INST, WORCESTER, MA 01609 USA
[2] MICHELSON LAB, CHINA LAKE, CA 93555 USA
来源：
SURFACE SCIENCE | 1973年 / 37卷 / 01期
关键词：
D O I：
10.1016/0039-6028(73)90345-2
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：548 / 558
页数：11
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