INVESTIGATION OF FILM-THICKNESS DETERMINATION BY OSCILLATING QUARTZ RESONATORS WITH LARGE MASS LOAD

被引：332

作者：

LU, CS

LEWIS, O

机构：

来源：

关键词：

D O I：

10.1063/1.1660931

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4385 / &

共 10 条

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