DETECTION OF TRACE CONCENTRATIONS OF COLUMN-III AND COLUMN-V HYDRIDES BY LASER-INDUCED BREAKDOWN SPECTROSCOPY

被引：26
作者：
CHENG, EAP [1 ]
FRASER, RD [1 ]
EDEN, JG [1 ]
机构：
[1] UNIV ILLINOIS,EVERITT LAB,URBANA,IL 61801
来源：
APPLIED SPECTROSCOPY | 1991年 / 45卷 / 06期
关键词：
FLUORESCENCE; LASERS; ND-YAG; UV-VISIBLE SPECTROSCOPY; LASER-INDUCED BREAKDOWN SPECTROSCOPY;
D O I：
10.1366/0003702914336273
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The measurement of trace concentrations (1-400 ppm) of polyatomic molecular impurities in helium was investigated by laser-induced break-down spectroscopy (LIBS). For the Column III and V hydrides such as B2H6, PH3, and AsH3, the detectability limits with the present apparatus were determined to be 1, 3, and approximately 1 ppm, respectively. It is expected that resorting to synchronous detection techniques will improve the sensitivity of LIBS for this application by as much as an order of magnitude.
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收藏
页码：949 / 952
页数：4
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