FOCUSING PROTONS AND LIGHT-IONS TO MICRON AND SUB-MICRON DIMENSIONS

被引:51
|
作者
GRIME, GW
WATT, F
机构
[1] Univ of Oxford, Oxford, Engl, Univ of Oxford, Oxford, Engl
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 30卷 / 03期
关键词
D O I
10.1016/0168-583X(88)90002-X
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
ION BEAMS
引用
收藏
页码:227 / 234
页数:8
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