MICROKINETIC THEORY OF RADIATION-ENHANCED DIFFUSION IN ELEMENTARY SEMICONDUCTORS

被引:0
作者
VASILEVSKIY, MI
ERSHOV, SH
PANTELEEV, VA
机构
来源
CRYSTAL LATTICE DEFECTS AND AMORPHOUS MATERIALS | 1987年 / 13卷 / 3-4期
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O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:289 / 296
页数:8
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