METAL-DEPOSITION AT 532-NM USING A LASER TRANSFER TECHNIQUE

被引：147

作者：

BOHANDY, J

KIM, BF

ADRIAN, FJ

JETTE, AN

机构：

来源：

关键词：

D O I：

10.1063/1.340023

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1158 / 1162

页数：5

共 13 条

[1] A STUDY OF THE MECHANISM OF METAL-DEPOSITION BY THE LASER-INDUCED FORWARD TRANSFER PROCESS
ADRIAN, FJ
BOHANDY, J
KIM, BF
JETTE, AN
THOMPSON, P
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (05): : 1490 - 1494
[2] LASER CHEMICAL VAPOR-DEPOSITION - A TECHNIQUE FOR SELECTIVE AREA DEPOSITION
ALLEN, SD
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) : 6501 - 6505
[3] METAL-DEPOSITION FROM A SUPPORTED METAL-FILM USING AN EXCIMER LASER
BOHANDY, J
KIM, BF
ADRIAN, FJ
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (04) : 1538 - 1539
[4] CARSLAW HS, 1959, CONDUCTION HEAT SOLI
[5] EHRLICH DJ, 1983, VLSI ELECTRONICS MIC, V7, P129
[6] A NUMERICAL METHOD OF SOLVING A HEAT FLOW PROBLEM WITH MOVING BOUNDARY
EHRLICH, LW
[J]. JOURNAL OF THE ACM, 1958, 5 (02) : 161 - 176
[7] DIRECT WRITING OF METAL CONDUCTORS WITH NEAR-UV LIGHT
GILGEN, HH
CACOURIS, T
SHAW, PS
KRCHNAVEK, RR
OSGOOD, RM
[J]. APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1987, 42 (02): : 55 - 66
[8] LASER-INITIATED DEPOSITION REACTIONS - MICROCHEMISTRY IN ORGANOGOLD POLYMER-FILMS
GROSS, ME
FISANICK, GJ
GALLAGHER, PK
SCHNOES, KJ
FENNELL, MD
[J]. APPLIED PHYSICS LETTERS, 1985, 47 (09) : 923 - 925
[9] HERNAN IP, 1983, MATER RES SOC S P, V17, P9
[10] LASER CHEMICAL VAPOR-DEPOSITION OF COPPER
HOULE, FA
JONES, CR
BAUM, T
PICO, C
KOVAC, CA
[J]. APPLIED PHYSICS LETTERS, 1985, 46 (02) : 204 - 206