Fabrication of Biomimetic MEMS Acoustic Sensor and Analysis of Its Frequency Characteristics

被引：0

作者：

Hur, Shin ^{[1
]}

Jung, Youngdo ^{[1
]}

Lee, Young Hwa ^{[1
]}

Song, Won Joon ^{[1
]}

Kim, Wandoo ^{[1
]}

机构：

[1] Korea Inst Machinery & Mat, Nanomech Syst Div, Daejeon 305343, South Korea

来源：

JOURNAL OF THE KOREAN SOCIETY FOR NONDESTRUCTIVE TESTING | 2011年 / 31卷 / 05期

关键词：

Biomimetic; Acoustic Sensor; Piezoelectric; PVDF; Resonant Frequency; Laser Doppler Vibrometer (LDV); Artificial Basilar Membrane(ABM);

D O I：

暂无

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Artificial basilar membranes made of PVDF(polyvinylidene fluoride) are manufactured using microfabrication processes. The mechanical behavior of PVDF artificial basilar membrane was measured to evaluate its performance as a mechanical frequency analyzer using scanning LDV(laser Doppler vibrometer). The experimental setup consists of the microfabricated artificial basilar membrane, a loud speaker connected to an amplifier for generating acoustic pressure of specific spectral pattern, and a scanning LDV with controlling unit for measuring the displacement of the membrane on the incoming acoustic stimulation. The microfabricated artificial basilar membrane was attached tightly upon a package containing a chamber which can be filled with silicone oil before placed on the experimental setup stage. The experiment results showed that the microfabricated artificial basilar membrane has a property as a mechanical frequency analyzer.

引用

页码：522 / 528

页数：7

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