THE EFFECT OF SUBSTRATE-TEMPERATURE ON THE ELECTRICAL-PROPERTIES OF THIN CHROMIUM FILMS

被引：23

|

作者：

ANGADI, MA

UDACHAN, LA

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1981年 / 16卷 / 05期

关键词：

D O I：

10.1007/BF01033860

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：1412 / 1415

页数：4

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