共 50 条
- [1] LASER OSCILLATION AT 5378 A BY LASER-PRODUCED CADMIUM PLASMAJAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (10) : 2033 - 2034TOYODA, K论文数: 0 引用数: 0 h-index: 0机构: RIKEN,INST PHYS & CHEM RES,WAKO,SAITAMA 351,JAPAN RIKEN,INST PHYS & CHEM RES,WAKO,SAITAMA 351,JAPANKOBIYAMA, M论文数: 0 引用数: 0 h-index: 0机构: RIKEN,INST PHYS & CHEM RES,WAKO,SAITAMA 351,JAPAN RIKEN,INST PHYS & CHEM RES,WAKO,SAITAMA 351,JAPANNAMBA, S论文数: 0 引用数: 0 h-index: 0机构: RIKEN,INST PHYS & CHEM RES,WAKO,SAITAMA 351,JAPAN RIKEN,INST PHYS & CHEM RES,WAKO,SAITAMA 351,JAPAN
- [2] Laser-produced plasma source system developmentEMERGING LITHOGRAPHIC TECHNOLOGIES XI, PTS 1 AND 2, 2007, 6517Fomenkov, Igor V.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USABrandt, David C.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USABykanov, Alexander N.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAErshov, Alex I.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAPartlo, William N.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAMyers, David W.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USABbwering, Norbert R.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAVaschenko, Georgiy O.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAKhodykin, Oleh V.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAHoffman, Jerzy R.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAVargas, Ernesto论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USASimmons, Rodney D.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAChavez, Juan A.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAChrobak, Christopher P.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USA
- [3] Laser-Produced Plasma Light Source for EUVLALTERNATIVE LITHOGRAPHIC TECHNOLOGIES, 2009, 7271Fomenkov, Igor V.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USABrandt, David C.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USABykanov, Alexander N.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAErshov, Alex I.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAPartlo, William N.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAMyers, David W.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USABoewering, Norbert R.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAFarrar, Nigel R.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAVaschenko, Georgiy O.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAKhodykin, Oleh V.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAHoffman, Jerzy R.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAChrobak, Christopher P.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USASrivastava, Shailendra N.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAGolich, Daniel J.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAVidusek, David A.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USADe Dea, Silvia论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USAHou, Richard R.论文数: 0 引用数: 0 h-index: 0机构: Cymer Inc, San Diego, CA 92127 USA Cymer Inc, San Diego, CA 92127 USA
- [4] Laser-produced plasma sustained by a radiofrequency sourceIEEE International Conference on Plasma Science, 2000,Kelly, K.L.论文数: 0 引用数: 0 h-index: 0机构: Univ of Wisconsin, Madison, United States Univ of Wisconsin, Madison, United StatesScharer, J.E.论文数: 0 引用数: 0 h-index: 0机构: Univ of Wisconsin, Madison, United States Univ of Wisconsin, Madison, United StatesDing, G.论文数: 0 引用数: 0 h-index: 0机构: Univ of Wisconsin, Madison, United States Univ of Wisconsin, Madison, United StatesPaller, E.论文数: 0 引用数: 0 h-index: 0机构: Univ of Wisconsin, Madison, United States Univ of Wisconsin, Madison, United StatesCao, R.论文数: 0 引用数: 0 h-index: 0机构: Univ of Wisconsin, Madison, United States Univ of Wisconsin, Madison, United States
- [5] PHOTO-ELECTRON AND PHOTOIONIZATION PUMPING OF XUV LASERS BY LASER-PRODUCED PLASMASINSTITUTE OF PHYSICS CONFERENCE SERIES, 1990, (116): : 21 - 28BARTY, CPJ论文数: 0 引用数: 0 h-index: 0YIN, GY论文数: 0 引用数: 0 h-index: 0FIELD, JE论文数: 0 引用数: 0 h-index: 0BENEROFE, SJ论文数: 0 引用数: 0 h-index: 0YOUNG, JF论文数: 0 引用数: 0 h-index: 0HARRIS, SE论文数: 0 引用数: 0 h-index: 0
- [6] HIGH-POWER CADMIUM PHOTOIONIZATION LASER PUMPED BY SOFT X-RAYS FROM A LASER-PRODUCED MULTISPOT PLASMAOPTICS LETTERS, 1990, 15 (09) : 480 - 482HUBE, M论文数: 0 引用数: 0 h-index: 0机构: Institut für Quantenoptik, Universität Hannover, Hannover 1, D-3000MICHAEL, J论文数: 0 引用数: 0 h-index: 0机构: Institut für Quantenoptik, Universität Hannover, Hannover 1, D-3000WELLEGEHAUSEN, B论文数: 0 引用数: 0 h-index: 0机构: Institut für Quantenoptik, Universität Hannover, Hannover 1, D-3000
- [7] Laser-produced plasma source development for EUV lithographyALTERNATIVE LITHOGRAPHIC TECHNOLOGIES, 2009, 7271Endo, Akira论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanKomori, Hiroshi论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanUeno, Yoshifumi论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanNowak, Krzysztof M.论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanTakayuki, Yabu论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanTatsuya, Yanagida论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanSuganuma, Takashi论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanAsayama, Takeshi论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanSomeya, Hiroshi论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanHoshino, Hideo论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanNakano, Masaki论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanMoriya, Masato论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanNishisaka, Toshihiro论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanAbe, Tamotsu论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanSumitani, Akira论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanNagano, Hitoshi论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanSasaki, Youichi论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanNagai, Shinji论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanWatanabe, Yukio论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanSoumagne, Georg论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanIshihara, Takanobu论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanWakabayashi, Osamu论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanKakizaki, Kouji论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, JapanMizoguchi, Hakaru论文数: 0 引用数: 0 h-index: 0机构: EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan EUVA Gigaphoton Komatsu, Kanagawa 2548567, Japan
- [8] The development of laser-produced plasma EUV light sourceCHIP, 2022, 1 (03):Yang, De-Kun论文数: 0 引用数: 0 h-index: 0机构: Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R China Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R ChinaWang, Du论文数: 0 引用数: 0 h-index: 0机构: Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R China Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R ChinaHuang, Qiu-Shi论文数: 0 引用数: 0 h-index: 0机构: Tongji Univ, Inst Precis Opt Engn, Sch Phys Sci & Engn, Key Lab Adv Microstruct Mat MOE, Shanghai 200092, Peoples R China Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R ChinaSong, Yi论文数: 0 引用数: 0 h-index: 0机构: Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R China Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R ChinaWu, Jian论文数: 0 引用数: 0 h-index: 0机构: East China Normal Univ, State Key Lab Precis Spect, Shanghai 200241, Peoples R China Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R ChinaLi, Wen-Xue论文数: 0 引用数: 0 h-index: 0机构: East China Normal Univ, State Key Lab Precis Spect, Shanghai 200241, Peoples R China Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R ChinaWang, Zhan-Shan论文数: 0 引用数: 0 h-index: 0机构: Tongji Univ, Inst Precis Opt Engn, Sch Phys Sci & Engn, Key Lab Adv Microstruct Mat MOE, Shanghai 200092, Peoples R China Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R ChinaTang, Xia-Hui论文数: 0 引用数: 0 h-index: 0机构: Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Wuhan 430074, Peoples R China Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R ChinaXu, Hong-Xing论文数: 0 引用数: 0 h-index: 0机构: Wuhan Univ, Sch Phys & Technol, Wuhan 430072, Peoples R China Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R ChinaLiu, Sheng论文数: 0 引用数: 0 h-index: 0机构: Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R China Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R ChinaGui, Cheng-Qun论文数: 0 引用数: 0 h-index: 0机构: Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R China Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R China
- [9] Development of EUV light source by laser-produced plasmaJOURNAL DE PHYSIQUE IV, 2006, 133 : 1161 - 1165Izawa, Y.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, Japan Osaka Univ, Inst Laser Engn, Osaka, JapanMiyanaga, N.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanNishimura, H.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanFujioka, S.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanAota, T.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanTao, Y.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanUchida, S.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanShimada, Y.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanHashimoto, K.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanYamaura, M.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanNishihara, K.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanMurakami, M.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanSunahara, A.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanFurukawa, H.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanSasaki, A.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanNishikawa, W.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanTanuma, H.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanNorimatsu, T.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanNagai, K.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanGu, Q.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanNakatsuka, M.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanFujita, H.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanTsubakimoto, K.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanYoshida, H.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, JapanMima, K.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Osaka, Japan
- [10] EFFECT OF PLASMA-CONFINEMENT ON THE OUTPUT FROM A LASER-PRODUCED CADMIUM PLASMA RECOMBINATION LASERIEEE JOURNAL OF QUANTUM ELECTRONICS, 1979, 15 (09) : D61 - D61SILFVAST, WT论文数: 0 引用数: 0 h-index: 0机构: BELL TEL LABS INC,HOLMDEL,NJ 07733 BELL TEL LABS INC,HOLMDEL,NJ 07733SZETO, LH论文数: 0 引用数: 0 h-index: 0机构: BELL TEL LABS INC,HOLMDEL,NJ 07733 BELL TEL LABS INC,HOLMDEL,NJ 07733