LASER-PRODUCED PLASMA - A PUMPING SOURCE FOR CADMIUM PHOTOIONIZATION LASER

被引:0
|
作者
TAMBAY, R [1 ]
THAREJA, RK [1 ]
机构
[1] INDIAN INST TECHNOL,CTR LASER TECHNOL,KANPUR 208016,UTTAR PRADESH,INDIA
来源
PRAMANA-JOURNAL OF PHYSICS | 1993年 / 41卷 / 03期
关键词
HEAT PIPE; PLASMA; LASER; PHOTOIONIZATION; BLACK BODY;
D O I
10.1007/BF02847443
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We report laser oscillations in Cd II on 4d9 5s2 2D5/2 - 4d10 5p2 P3/2 transition at 441.6 nm using laser produced tungsten plasma as a pumping source. Mach Zehnder interferometer is used to measure electron density. Design and working of the crossed heat pipe used in the studies is discussed.
引用
收藏
页码:257 / 269
页数:13
相关论文
共 50 条
  • [1] LASER OSCILLATION AT 5378 A BY LASER-PRODUCED CADMIUM PLASMA
    TOYODA, K
    KOBIYAMA, M
    NAMBA, S
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (10) : 2033 - 2034
  • [2] Laser-produced plasma source system development
    Fomenkov, Igor V.
    Brandt, David C.
    Bykanov, Alexander N.
    Ershov, Alex I.
    Partlo, William N.
    Myers, David W.
    Bbwering, Norbert R.
    Vaschenko, Georgiy O.
    Khodykin, Oleh V.
    Hoffman, Jerzy R.
    Vargas, Ernesto
    Simmons, Rodney D.
    Chavez, Juan A.
    Chrobak, Christopher P.
    EMERGING LITHOGRAPHIC TECHNOLOGIES XI, PTS 1 AND 2, 2007, 6517
  • [3] Laser-Produced Plasma Light Source for EUVL
    Fomenkov, Igor V.
    Brandt, David C.
    Bykanov, Alexander N.
    Ershov, Alex I.
    Partlo, William N.
    Myers, David W.
    Boewering, Norbert R.
    Farrar, Nigel R.
    Vaschenko, Georgiy O.
    Khodykin, Oleh V.
    Hoffman, Jerzy R.
    Chrobak, Christopher P.
    Srivastava, Shailendra N.
    Golich, Daniel J.
    Vidusek, David A.
    De Dea, Silvia
    Hou, Richard R.
    ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES, 2009, 7271
  • [4] Laser-produced plasma sustained by a radiofrequency source
    Kelly, K.L.
    Scharer, J.E.
    Ding, G.
    Paller, E.
    Cao, R.
    IEEE International Conference on Plasma Science, 2000,
  • [5] PHOTO-ELECTRON AND PHOTOIONIZATION PUMPING OF XUV LASERS BY LASER-PRODUCED PLASMAS
    BARTY, CPJ
    YIN, GY
    FIELD, JE
    BENEROFE, SJ
    YOUNG, JF
    HARRIS, SE
    INSTITUTE OF PHYSICS CONFERENCE SERIES, 1990, (116): : 21 - 28
  • [6] HIGH-POWER CADMIUM PHOTOIONIZATION LASER PUMPED BY SOFT X-RAYS FROM A LASER-PRODUCED MULTISPOT PLASMA
    HUBE, M
    MICHAEL, J
    WELLEGEHAUSEN, B
    OPTICS LETTERS, 1990, 15 (09) : 480 - 482
  • [7] Laser-produced plasma source development for EUV lithography
    Endo, Akira
    Komori, Hiroshi
    Ueno, Yoshifumi
    Nowak, Krzysztof M.
    Takayuki, Yabu
    Tatsuya, Yanagida
    Suganuma, Takashi
    Asayama, Takeshi
    Someya, Hiroshi
    Hoshino, Hideo
    Nakano, Masaki
    Moriya, Masato
    Nishisaka, Toshihiro
    Abe, Tamotsu
    Sumitani, Akira
    Nagano, Hitoshi
    Sasaki, Youichi
    Nagai, Shinji
    Watanabe, Yukio
    Soumagne, Georg
    Ishihara, Takanobu
    Wakabayashi, Osamu
    Kakizaki, Kouji
    Mizoguchi, Hakaru
    ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES, 2009, 7271
  • [8] The development of laser-produced plasma EUV light source
    Yang, De-Kun
    Wang, Du
    Huang, Qiu-Shi
    Song, Yi
    Wu, Jian
    Li, Wen-Xue
    Wang, Zhan-Shan
    Tang, Xia-Hui
    Xu, Hong-Xing
    Liu, Sheng
    Gui, Cheng-Qun
    CHIP, 2022, 1 (03):
  • [9] Development of EUV light source by laser-produced plasma
    Izawa, Y.
    Miyanaga, N.
    Nishimura, H.
    Fujioka, S.
    Aota, T.
    Tao, Y.
    Uchida, S.
    Shimada, Y.
    Hashimoto, K.
    Yamaura, M.
    Nishihara, K.
    Murakami, M.
    Sunahara, A.
    Furukawa, H.
    Sasaki, A.
    Nishikawa, W.
    Tanuma, H.
    Norimatsu, T.
    Nagai, K.
    Gu, Q.
    Nakatsuka, M.
    Fujita, H.
    Tsubakimoto, K.
    Yoshida, H.
    Mima, K.
    JOURNAL DE PHYSIQUE IV, 2006, 133 : 1161 - 1165
  • [10] EFFECT OF PLASMA-CONFINEMENT ON THE OUTPUT FROM A LASER-PRODUCED CADMIUM PLASMA RECOMBINATION LASER
    SILFVAST, WT
    SZETO, LH
    IEEE JOURNAL OF QUANTUM ELECTRONICS, 1979, 15 (09) : D61 - D61