ANGULAR-DISTRIBUTION AND DIFFERENTIAL SPUTTERING YIELDS FOR LOW-ENERGY LIGHT-ION IRRADIATION OF POLYCRYSTALLINE NICKEL AND TUNGSTEN

被引:56
作者
BAY, HL
BOHDANSKY, J
HOFER, WO
ROTH, J
机构
来源
APPLIED PHYSICS | 1980年 / 21卷 / 04期
关键词
D O I
10.1007/BF00895923
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:327 / 333
页数:7
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