ANGULAR-DISTRIBUTION AND DIFFERENTIAL SPUTTERING YIELDS FOR LOW-ENERGY LIGHT-ION IRRADIATION OF POLYCRYSTALLINE NICKEL AND TUNGSTEN

被引：56
作者：
BAY, HL
BOHDANSKY, J
HOFER, WO
ROTH, J
机构：
来源：
APPLIED PHYSICS | 1980年 / 21卷 / 04期
关键词：
D O I：
10.1007/BF00895923
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：327 / 333
页数：7
相关论文
共 27 条
[1]   SPUTTERING YIELDS FOR LIGHT-IONS AS A FUNCTION OF ANGLE OF INCIDENCE [J].
BAY, HL ;
BOHDANSKY, J .
APPLIED PHYSICS, 1979, 19 (04) :421-426
[2]   SPUTTERING MECHANISM FOR LOW-ENERGY LIGHT-IONS [J].
BEHRISCH, R ;
MADERLECHNER, G ;
SCHERZER, BMU ;
ROBINSON, MT .
APPLIED PHYSICS, 1979, 18 (04) :391-398
[3]   DEVELOPMENTS IN SECONDARY ION MASS-SPECTROSCOPY AND APPLICATIONS TO SURFACE STUDIES [J].
BENNINGHOVEN, A .
SURFACE SCIENCE, 1975, 53 (DEC) :596-625
[4]  
Betz G., 1971, International Journal of Mass Spectrometry and Ion Physics, V6, P451, DOI 10.1016/0020-7381(71)85022-2
[5]   BACKSCATTERING OF KEV MOLECULAR-HYDROGEN IONS FROM AU SURFACES [J].
ECKSTEIN, W ;
VERBEEK, H ;
DATZ, S .
APPLIED PHYSICS LETTERS, 1975, 27 (10) :527-528
[6]   LOW-ENERGY SELF-SPUTTERING YIELDS OF NICKEL [J].
HECHTL, E ;
BAY, HL ;
BOHDANSKY, J .
APPLIED PHYSICS, 1978, 16 (02) :147-150
[7]  
Hofer W. O., 1973, Radiation Effects, V19, P263, DOI 10.1080/00337577308232258
[8]   SPUTTER-EROSION AND IMPURITY EMISSION FROM TITANIUM AND VANADIUM AT LOW-ENERGY ION-BOMBARDMENT [J].
HOFER, WO ;
BAY, HL ;
MARTIN, PJ .
JOURNAL OF NUCLEAR MATERIALS, 1978, 76-7 (1-2) :156-162
[9]   DISTORTION OF SPUTTERING SPOT PATTERNS OF SINGLE-CRYSTALS DUE TO INCOMPLETE CONDENSATION [J].
HOFER, WO .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1974, 21 (03) :141-144
[10]  
LITTMARK U, 1978, J MATER SCI, V13, P2577, DOI 10.1007/BF02402744
123