3-DIMENSIONAL SIMULATION OF ION-ENHANCED DRY-ETCH PROCESSES

被引：13
作者：
PELKA, J
机构：
[1] Fraunhofer-Institut für Mikrostrukturtechnik (IMT), D-1000 Berlin 33
来源：
MICROELECTRONIC ENGINEERING | 1991年 / 14卷 / 3-4期
关键词：
CELL MODEL; DRY ETCHING; MICROLOADING; MONTE-CARLO METHODS; SIMULATION; SURFACE PROCESSES;
D O I：
10.1016/0167-9317(91)90012-3
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new approach for dry-etch simulation is presented which combines the features of a three-dimensional cell model with Monte-Carlo methods. This algorithm is able to simulate etching by elementary processes considering different kinds of particles coming out of the plasma. Some basic process models are discussed using the results obtained from this new approach. Additionally, simulations of three-dimensional geometrical effects are shown which cannot be achieved from common two-dimensional profile simulators.
引用
收藏
页码：269 / 281
页数：13
相关论文
共 32 条
  • [31] 3rd-order Spectral Representation Method: Simulation of multi-dimensional random fields and ergodic multi-variate random processes with fast Fourier transform implementation
    Vandanapu, Lohit
    Shields, Michael D.
    PROBABILISTIC ENGINEERING MECHANICS, 2021, 64
  • [32] High-quality 3-dimensional image simulation for pulmonary lobectomy and segmentectomy: results of preoperative assessment of pulmonary vessels and short-term surgical outcomes in consecutive patients undergoing video-assisted thoracic surgery
    Hagiwara, Masaru
    Shimada, Yoshihisa
    Kato, Yasufumi
    Nawa, Kimitoshi
    Makino, Yojiro
    Furumoto, Hideyuki
    Akata, Soichi
    Kakihana, Masatoshi
    Kajiwara, Naohiro
    Ohira, Tatsuo
    Saji, Hisashi
    Ikeda, Norihiko
    EUROPEAN JOURNAL OF CARDIO-THORACIC SURGERY, 2014, 46 (06) : E120 - E126
1234