SOFT-X-RAY MULTILAYER PHASE-SHIFTER

被引：19

作者：

YAMAMOTO, M ^{[1
]}

YANAGIHARA, M ^{[1
]}

NOMURA, H ^{[1
]}

MAYAMA, K ^{[1
]}

KIMURA, H ^{[1
]}

机构：

[1] GRAD UNIV ADV STUDIES,PHOTON FACTORY,KEK,DEPT SYNCHROTRON RADIAT SCI,TSUKUBA 305,JAPAN

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.1143007

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Phase shift versus incident angle characteristics of soft x-ray multilayer mirrors have been studied for the first time by rotating analyzer ellipsometry at 97 eV photon energy. Synchrotron radiation was used as a linear polarization source and a multilayer polarizer of 97% polarizance was used as the analyzer. By the reflection at two multilayers mounted in the double crystal configuration, circular polarization was produced. This confirmed a total phase shift of 90-degrees and proved the usefulness of the multilayer as a phase shifter for polarization evaluation.

引用

页码：1510 / 1512

页数：3

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