THERMODYNAMIC ANALYSIS OF THE DEPOSITION OF SNO2 THIN-FILMS FROM THE VAPOR-PHASE

被引：29

作者：

ADVANI, GN

JORDAN, AG

LUPIS, CHP

LONGINI, RL

机构：

[1] CARNEGIE MELLON UNIV, CTR JOINING MAT, PITTSBURGH, PA 15213 USA

[2] CARNEGIE MELLON UNIV, DEPT MET & MAT SCI, PITTSBURGH, PA 15213 USA

来源：

THIN SOLID FILMS | 1979年 / 62卷 / 03期

关键词：

D O I：

10.1016/0040-6090(79)90012-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A thermodynamic analysis of the hydrolysis reaction between tin tetrachloride and water vapor indicates that the rate of deposition of SnO2 is a strong function of the temperature and the ratio of the reactants. Good agreement is observed between theoretically derived results and those obtained experimentally; this suggests that the reaction proceeds essentially under equilibrium conditions. Variations in morphology with changes in the growth temperatures are reported with a plausible explanation for the observed results. © 1979.

引用

页码：361 / 368

页数：8

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