IONIC SPECIES RESPONSIBLE FOR THE PLASMA ANODIZATION OF SILICON

被引：18
作者：
BARLOW, KJ [1 ]
KIERMASZ, A [1 ]
ECCLESTON, W [1 ]
MORUZZI, JL [1 ]
机构：
[1] UNIV LIVERPOOL,DEPT ELECT ENGN & ELECTR,LIVERPOOL L69 3BX,ENGLAND
来源：
APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 01期
关键词：
D O I：
10.1063/1.100571
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：57 / 59
页数：3
相关论文
共 7 条
  • [1] Albritton DL., 1978, ATOM DATA NUCL DATA, V22, P1, DOI DOI 10.1016/0092-640X(78)90027-X
  • [2] AN IMPROVED THEORY FOR THE PLASMA ANODIZATION OF SILICON
    BARLOW, K
    KIERMASZ, A
    ECCLESTON, W
    [J]. IEE PROCEEDINGS-I COMMUNICATIONS SPEECH AND VISION, 1985, 132 (04): : 181 - 183
  • [3] KIERMASZ A, 1983, THESIS U LIVERPOOL
  • [4] MORUZZI JL, 1966, J CHEM PHYS, V45, P4612
  • [5] OHANLON JF, 1971, APPL PHYS LETT, V18, P544
  • [6] ROLE OF PLASMA NEGATIVE-IONS IN PLASMA ANODIZATION
    OLIVE, G
    YOUNG, L
    PULFREY, DL
    [J]. THIN SOLID FILMS, 1972, 12 (02) : 427 - &
  • [7] ELECTRON ATTACHMENT AND NEGATIVE ION-MOLECULE REACTIONS IN NITROUS-OXIDE
    PARKES, DA
    [J]. JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS I, 1972, 68 (11): : 2103 - &
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