Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators

被引：386
|
作者：
Minne, SC
Manalis, SR
Quate, CF
机构：
[1] E. L. Ginzton Laboratory, Stanford University, Stanford
来源：
APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 26期
关键词：
D O I：
10.1063/1.115317
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have fabricated and operated two cantilevers in parallel in a new mode for imaging with the atomic force microscope (AFM). The cantilevers contain both an integrated piezoresistive silicon sensor and an integrated piezoelectric zinc oxide (ZnO) actuator. The integration of sensor and actuator on a single cantilever allows us to simultaneously record two independent AFM images in the constant force mode. The ZnO actuator provides over 4 mu m of deflection at low frequencies (de) and over 30 mu m deflection at the first resonant frequency. The piezoresistive element is used to detect the strain and provide the feedback signal for the ZnO actuator. (C) 1995 American Institute of Physics.
引用
收藏
页码：3918 / 3920
页数：3
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