FUNDAMENTAL-MODE VHF-UHF MINIATURE ACOUSTIC RESONATORS AND FILTERS ON SILICON

被引：105

作者：

GRUDKOWSKI, TW

BLACK, JF

REEDER, TM

CULLEN, DE

WAGNER, RA

机构：

来源：

APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 11期

关键词：

D O I：

10.1063/1.91745

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：993 / 995

页数：3

共 12 条

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