FUNDAMENTAL-MODE VHF-UHF MINIATURE ACOUSTIC RESONATORS AND FILTERS ON SILICON

被引：105
|
作者：
GRUDKOWSKI, TW
BLACK, JF
REEDER, TM
CULLEN, DE
WAGNER, RA
机构：
来源：
APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 11期
关键词：
D O I：
10.1063/1.91745
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：993 / 995
页数：3
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