IMPROVEMENTS IN THE DISILANE PLASMA DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON SOLAR-CELLS

被引：3

作者：

VANIER, PE ^{[1
]}

SU, FC ^{[1
]}

机构：

[1] SUNY STONY BROOK,DEPT MAT SCI & ENGN,STONY BROOK,NY 11794

来源：

SOLAR CELLS | 1987年 / 21卷

关键词：

D O I：

10.1016/0379-6787(87)90116-5

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：167 / 175

页数：9

共 13 条

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[3] HIGH-RATE DEPOSITION OF AMORPHOUS HYDROGENATED SILICON FROM A SIH4 PLASMA [J].

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[4] HIGH DEPOSITION RATE PREPARATION OF AMORPHOUS-SILICON SOLAR-CELLS BY RF GLOW-DISCHARGE DECOMPOSITION OF DISILANE [J].

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[8] HIGH-PERFORMANCE HYDROGENATED AMORPHOUS-SILICON SOLAR-CELLS MADE AT A HIGH DEPOSITION RATE BY GLOW-DISCHARGE OF DISILANE [J].

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