SELECTIVE DEPOSITION OF SIO2 THIN-FILMS IN ACID BATHS

被引：3
|
作者：
SMITH, MA [1 ]
LEVENSON, LL [1 ]
机构：
[1] UNIV MISSOURI,GRAD CTR MAT RES,ROLLA,MO 65401
来源：
THIN SOLID FILMS | 1982年 / 95卷 / 02期
关键词：
D O I：
10.1016/0040-6090(82)90238-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：161 / 166
页数：6
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