INTERFACIAL REACTIONS BETWEEN TITANIUM FILM AND SINGLE-CRYSTAL ALPHA-AL2O3

被引:23
作者
KOYAMA, M
ARAI, S
SUENAGA, S
NAKAHASHI, M
机构
[1] Research and Development Center, Toshiba Corporation, Kawasaki, 210, 1 Komukai-Toshiba-Cho, Saiwai-Ku
关键词
D O I
10.1007/BF01151265
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Titanium is commonly used to join metals and ceramics by active metal brazing methods. In this work, titanium was sputter deposited on to single-crystal alpha-Al2O3 substrates and the interfacial reactions between the titanium film and the Al2O3 substrate were studied. Al2O3 was reduced by titanium when samples were annealed at 973 and 1173 K for 300 s in an argon gas flow. Metallic aluminium was produced at the interface, and this diffused from the interface into the titanium film. At 1173 K, the intermetallic compound Ti3Al and the intermediate titanium oxides, such as Ti2O and TiO, were formed. The Al(O) diffusion is important in stimulating interfacial reactions.
引用
收藏
页码:830 / 834
页数:5
相关论文
共 27 条
  • [1] TIOX AL2O3 MULTILAYER CERAMIC THIN-FILMS
    ALEXANDER, KB
    WALKER, FJ
    MCKEE, RA
    LIST, FA
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (06) : 1737 - 1743
  • [2] BLACKBURN MJ, 1967, T METALL SOC AIME, V239, P1200
  • [3] STRUCTURE, CHEMISTRY AND DIFFUSION BONDING OF METAL CERAMIC INTERFACES
    BURGER, K
    MADER, W
    RUHLE, M
    [J]. ULTRAMICROSCOPY, 1987, 22 (1-4) : 1 - 13
  • [4] SOLID-STATE REACTION OF TI AND SAPPHIRE
    CHAMBERLAIN, MB
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02): : 240 - 242
  • [5] INTERACTION OF TI WITH FUSED-SILICA AND SAPPHIRE DURING METALLIZATION
    CHAUG, YS
    CHOU, NJ
    KIM, YH
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1288 - 1291
  • [6] ELECTRONIC-STRUCTURE OF ALPHA-ALUMINA AND ITS DEFECT STATES
    CIRACI, S
    BATRA, IP
    [J]. PHYSICAL REVIEW B, 1983, 28 (02): : 982 - 992
  • [7] 1ST PRINCIPLES CALCULATIONAL METHODS FOR SURFACE-VACANCY FORMATION ENERGIES, HEATS OF SEGREGATION, AND SURFACE CORE-LEVEL SHIFTS
    FEIBELMAN, PJ
    [J]. PHYSICAL REVIEW B, 1989, 39 (08): : 4866 - 4871
  • [8] VACUUM ULTRAVIOLET, PHOTOEMISSION AND THEORETICAL-STUDIES OF THE ELECTRONIC-STRUCTURE OF AL2O3 UP TO 1000-DEGREES-C
    FRENCH, RH
    COBLE, RL
    KASOWSKI, RV
    OHUCHI, FS
    [J]. PHYSICA B & C, 1988, 150 (1-2): : 47 - 49
  • [9] VALENCE-BAND AND CONDUCTION-BAND STRUCTURE OF THE SAPPHIRE (1102) SURFACE
    GIGNAC, WJ
    WILLIAMS, RS
    KOWALCZYK, SP
    [J]. PHYSICAL REVIEW B, 1985, 32 (02): : 1237 - 1247
  • [10] PHOTON-STIMULATED DESORPTION AND OTHER SPECTROSCOPIC STUDIES OF THE INTERACTION OF OXYGEN WITH A TITANIUM (001) SURFACE
    HANSON, DM
    STOCKBAUER, R
    MADEY, TE
    [J]. PHYSICAL REVIEW B, 1981, 24 (10): : 5513 - 5521