Raman spectroscopy and GC-MS analysis have been employed to examine the role of HCl and NH4 OH as a catalyst at the initial stage of the hydrolysis of Si(OCH3)4. Under the condition that the hydrolysis proceeded under the presence of amount of water less than theoretically required for the complete hydrolysis of Si(OCH3)4, H2O/Si(OCH3)4 < 2, the difference between the effects of two catalysts was distinctly observed in the stability of the intermediate products evolved. The reaction behavior of the intermediate product is qualitatively explained from a point of view of the inductive effect.