STUDIES OF ION-BEAM SPUTTERING AND DEPOSITION PROCESSES AND THEIR INFLUENCE ON SURFACE-TOPOGRAPHY

被引：0

作者：

CARTER, G ^{[1
]}

机构：

[1] UNIV SALFORD,DEPT ELECT ENGN,SALFORD M5 4WT,LANCS,ENGLAND

来源：

VACUUM | 1988年 / 38卷 / 11期

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1053 / 1054

页数：2

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