STUDIES OF ION-BEAM SPUTTERING AND DEPOSITION PROCESSES AND THEIR INFLUENCE ON SURFACE-TOPOGRAPHY

被引：0
|
作者：
CARTER, G [1 ]
机构：
[1] UNIV SALFORD,DEPT ELECT ENGN,SALFORD M5 4WT,LANCS,ENGLAND
来源：
VACUUM | 1988年 / 38卷 / 11期
关键词：
D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：1053 / 1054
页数：2
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