STRUCTURE, INTERNAL-STRESSES, ADHESION AND WEAR-RESISTANCE OF SPUTTERED ALUMINA COATINGS

被引：45
作者：
ROTH, T
KLOOS, KH
BROSZEIT, E
机构：
[1] Technical Univ of Darmstadt, Darmstadt, West Ger, Technical Univ of Darmstadt, Darmstadt, West Ger
来源：
THIN SOLID FILMS | 1987年 / 153卷
关键词：
D O I：
10.1016/0040-6090(87)90176-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
12
引用
收藏
页码：123 / 133
页数：11
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