THE ROLE OF REFLECTIVITY CHANGE IN OPTICALLY INDUCED RECRYSTALLIZATION OF THIN SILICON FILMS

被引：26

作者：

GRIGOROPOULOS, CP ^{[1
]}

BUCKHOLZ, RH ^{[1
]}

DOMOTO, GA ^{[1
]}

机构：

[1] XEROX PALO ALTO RES CTR,MECH ENGN SCI,N TARRYTOWN,NY 10591

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 02期

关键词：

HEAT SINKS - LASER BEAMS - Effects - LIGHT - Reflection - SEMICONDUCTING FILMS - Radiation Effects - SILICON AND ALLOYS - Recrystallization;

D O I：

10.1063/1.336652

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this paper we study a simplified model of the fundamental mechanisms governing the radiatively induced recrystallization of a thin polysilicon layer on a heat-sink structure. It has been observed that instabilities in laser induced crystal growth on thin polysilicon layers do occur. To study these solidification instabilities we use a linear stability analysis. The reflectivity difference between the liquid and the solid phases is shown to be a source of thermal instability.

引用

页码：454 / 458

页数：5

共 16 条

[1]

Biegelsen D.K., 1983, MAT RES SOC S P, V13, P537

[2]

BLAKELY JM, 1973, INTRO PROPERTIES CRY, P116

[3]

BOSCH MA, 1981, PHYS REV LETT, V47, P115

[4]

HAWKINS WG, 1982, APPL PHYS LETT, V42, P388

[5] INSTABILITY IN RADIATIVELY MELTED SILICON FILMS [J].

JACKSON, KA ;

KURTZE, DA .

JOURNAL OF CRYSTAL GROWTH, 1985, 71 (02) :385-390

[6] TEMPERATURE-DEPENDENCE OF THE REFLECTANCE OF SOLID AND LIQUID SILICON [J].

LAMPERT, MO ;

KOEBEL, JM ;

SIFFERT, P .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (08) :4975-4976

[7] MICROSCOPY OF SI FILMS DURING LASER MELTING [J].

LEMONS, RA ;

BOSCH, MA .

APPLIED PHYSICS LETTERS, 1982, 40 (08) :703-706

[8]

MEYER JR, 1980, J APPL PHYS, V51, P5520

[9] STABILITY OF PLANAR INTERFACE DURING SOLIDIFICATION OF DILUTE BINARY ALLOY [J].

MULLINS, WW ;

SEKERKA, RF .

JOURNAL OF APPLIED PHYSICS, 1964, 35 (02) :444-&

[10] ALIGNED, COEXISTING LIQUID AND SOLID REGIONS IN LASER-ANNEALED SI [J].

NEMANICH, RJ ;

BIEGELSEN, DK ;

HAWKINS, WG .

PHYSICAL REVIEW B, 1983, 27 (12) :7817-7819

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