DIELECTRIC PROPERTIES OF SrTiO3 THIN FILMS AT LOW TEMPERATURE

被引：2

作者：

Kain, A. Z. ^{[1
]}

Pettiette-Hall, C. L. ^{[1
]}

Daly, K. P. ^{[1
]}

Lee, A. E. ^{[1
]}

Hu, R. ^{[1
]}

Burch, J. F. ^{[1
]}

机构：

[1] TRW Space & Technol Grp, One Space Pk, Redondo Beach, CA 90278 USA

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1993年 / 3卷 / 01期

关键词：

Capacitors - Ceramic materials - Copper oxides - Crystals - Dielectric properties of solids - Epitaxial growth - High temperature superconductors - Strontium compounds - Thin films - Yttrium compounds;

D O I：

10.1109/77.233631

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Epitaxially grown SrTiO3 thin films on c-axis oriented YBCO have good insulating properties for use in high temperature superconducting YBCO multilayer devices. We have fabricated YBCO (or Ag)/SrTiO3/YBCO capacitors for low frequency measurements and SrTiO3/YBCO/LaAlO3 coplanar waveguide end coupled resonators for high frequency measurements of the SrTiO3 dielectric constant at low temperatures. From the capacitor measurements, we obtained values for the dielectric constant which range from approximately 200 to 800 for films of various thicknesses. This behavior of the thin film dielectric constant differs from that of the bulk crystal.

引用

页码：1421 / 1424

页数：4

共 13 条

[1] WET ETCH PROCESS FOR PATTERNING INSULATORS SUITABLE FOR EPITAXIAL HIGH-TC SUPERCONDUCTING THIN-FILM MULTILEVEL ELECTRONIC-CIRCUITS [J].

EIDELLOTH, W ;

GALLAGHER, WJ ;

ROBERTAZZI, RP ;

KOCH, RH ;

OH, B ;

SANDSTROM, RL .

APPLIED PHYSICS LETTERS, 1991, 59 (10) :1257-1259

[2] MULTILAYER YBA2CU3OX-SRTIO3-YBA2CU3OX FILMS FOR INSULATING CROSSOVERS [J].

KINGSTON, JJ ;

WELLSTOOD, FC ;

LERCH, P ;

MIKLICH, AH ;

CLARKE, J .

APPLIED PHYSICS LETTERS, 1990, 56 (02) :189-191

[3] EPITAXIALLY GROWN SPUTTERED LAALO3 FILMS [J].

LEE, AE ;

PLATT, CE ;

BURCH, JF ;

SIMON, RW ;

GORAL, JP ;

ALJASSIM, MM .

APPLIED PHYSICS LETTERS, 1990, 57 (19) :2019-2021

[4] SOME ELECTRICAL PROPERTIES OF STRONTIUM TITANATE [J].

LINZ, A .

PHYSICAL REVIEW, 1953, 91 (03) :753-754

[5] X-RAY DIFFRACTOMETRY OF LOW-TEMPERATURE PHASE TRANSFORMATIONS IN STRONTIUM TITANATE [J].

LYTLE, FW .

JOURNAL OF APPLIED PHYSICS, 1964, 35 (07) :2212-&

[6] SENSITIVE YBA2CU3O7-X THIN-FILM MAGNETOMETER [J].

MIKLICH, AH ;

KINGSTON, JJ ;

WELLSTOOD, FC ;

CLARKE, J ;

COLCLOUGH, MS ;

CHAR, K ;

ZAHARCHUK, G .

APPLIED PHYSICS LETTERS, 1991, 59 (08) :988-990

[7] PERMITTIVITY OF STRONTIUM-TITANATE [J].

NEVILLE, RC ;

MEAD, CA ;

HOENEISE.B .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (05) :2124-&

[8] MULTILEVEL YBACUO FLUX TRANSFORMERS WITH HIGH-TC SQUIDS - A PROTOTYPE HIGH-TC SQUID MAGNETOMETER WORKING AT 77-K [J].

OH, B ;

KOCH, RH ;

GALLAGHER, WJ ;

ROBERTAZZI, RP ;

EIDELLOTH, W .

APPLIED PHYSICS LETTERS, 1991, 59 (01) :123-125

[9] EXCIMER LASER ABLATED STRONTIUM-TITANATE THIN-FILMS FOR DYNAMIC RANDOM-ACCESS MEMORY APPLICATIONS [J].

ROY, D ;

PENG, CJ ;

KRUPANIDHI, SB .

APPLIED PHYSICS LETTERS, 1992, 60 (20) :2478-2480

[10]

Vendik O. G., 1974, Soviet Physics - Solid State, V16, P788

← 1 2 →