A THIN-FILM CAPACITANCE HUMIDITY SENSOR

被引：44
|
作者：
JACHOWICZ, RS
SENTURIA, SD
机构：
来源：
SENSORS AND ACTUATORS | 1981年 / 2卷 / 02期
关键词：
D O I：
10.1016/0250-6874(81)80036-4
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：171 / 186
页数：16
相关论文
共 50 条
  • [1] A Thin-Film Capacitance Pressure Sensor
    A. A. Kazaryan
    E. V. Strel’tsov
    Measurement Techniques, 2015, 57 : 1403 - 1410
  • [2] A Thin-Film Capacitance Pressure Sensor
    Kazaryan, A. A.
    Strel'tsov, E. V.
    MEASUREMENT TECHNIQUES, 2015, 57 (12) : 1403 - 1410
  • [3] THIN-FILM ADSORPTION HUMIDITY SENSOR.
    Kotel'nikov, V.A.
    Petrov, Yu.I.
    Instruments and Experimental Techniques (English Translation of Pribory I Tekhnika Eksperimenta), 1973, 16 (6 Part 2): : 1829 - 1830
  • [4] THIN-FILM RESISTANCE HUMIDITY SENSOR.
    Hijikigawa, M.
    Miyoshi, S.
    Sugihara, T.
    Jinda, A.
    1600, (04):
  • [5] HUMIDITY SENSOR UTILIZING PLATINUM THIN-FILM TEMPERATURE SENSOR
    TSUDA, T
    ANDOH, Y
    SHARP TECHNICAL JOURNAL, 1988, (39): : 93 - 96
  • [6] RESISTIVE THERMOCONDUCTIVE HUMIDITY SENSOR WITH TAN THIN-FILM
    SHIOYAMA, T
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (01): : 41 - 43
  • [7] MAGNESIUM ALUMINUM SPINEL THIN-FILM AS A HUMIDITY SENSOR
    GUSMANO, G
    MONTESPERELLI, G
    TRAVERSA, E
    BEARZOTTI, A
    PETROCCO, G
    DAMICO, A
    DINATALE, C
    SENSORS AND ACTUATORS B-CHEMICAL, 1992, 7 (1-3) : 460 - 463
  • [8] IODINE-DOPED POLYPHENYLACETYLENE THIN-FILM AS A HUMIDITY SENSOR
    FURLANI, A
    IUCCI, G
    RUSSO, MV
    BEARZOTTI, A
    DAMICO, A
    SENSORS AND ACTUATORS B-CHEMICAL, 1992, 8 (01) : 123 - 126
  • [9] THIN-FILM CAPACITANCE PRESSURE TRANSDUCERS
    KAZARYAN, AA
    MEASUREMENT TECHNIQUES USSR, 1990, 33 (10): : 1008 - 1011
  • [10] A NEW THIN-FILM HUMIDITY MICROSENSOR
    CHEN, SN
    RAMAKRISHNAN, ES
    HUANG, RS
    GRANNEMANN, WW
    IEEE ELECTRON DEVICE LETTERS, 1984, 5 (11) : 452 - 453
12345