GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR MONITORING SPUTTER DEPOSITION

被引：1

作者：

SEQUEDAO.F

GREENE, JE

机构：

[1] UNIV ILLINOIS, DEPT MET, URBANA, IL 61801 USA

[2] UNIV ILLINOIS, DEPT COORINDATED SCI LAB, URBANA, IL USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 01期

关键词：

D O I：

10.1116/1.1318556

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：174 / 174

页数：1

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