KINETIC FACTORS IN CHEMICAL VAPOR-DEPOSITION OF CARBON FROM METHANE

被引：0

|

作者：

LIEBERMA.ML ^{[1
]}

NOLES, GT ^{[1
]}

机构：

[1] SANDIA LABS, ALBUQUERQUE, NM USA

来源：

CARBON | 1973年 / 11卷 / 06期

关键词：

D O I：

10.1016/0008-6223(73)90361-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：672 / 672

页数：1

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