Determination of the Optical Constants of Common Substrate Materials in the NIR/MIR-Spectral Regions

被引:3
|
作者
Franke, Christian [1 ]
Stenzel, Olaf [2 ]
Wilbrandt, Steffen [3 ]
Schuermann, Mark [4 ]
Wolf, Josephine [1 ]
Todorova, Vera [1 ]
Doherty, Brenda [3 ]
Kaiser, Norbert [5 ]
机构
[1] Ernst Abbe Hsch Jena, Jena, Germany
[2] Tech Univ Chemnitz, Chemnitz, Germany
[3] Univ Jena, D-07745 Jena, Germany
[4] Univ Dortmund, Dortmund, Germany
[5] EAH Jena, Phys & Technol Dunner Schichten, Jena, Germany
关键词
D O I
10.1002/vipr.201600601
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
An approach is reported for determining the optical constants of substrates and single layer coatings in the near and mid-infrared spectral regions. A combination of the algorithm from Nichelatti and a multi-oscillator model has been used to determine the optical constants of the substrates. Thus, the approach even works when the sample transmittance is vanishing. We demonstrate the application of the approach to the evaluation of transmission and reflection spectra of common substrates (CaF2, Q1, Sapphire) measured by a Fourier-Transform-Infrared spectrophotometer. The comparison of the calculated optical constants with values reported in literature confirms the validity of the used approach. We also demonstrate the IR characterisation of a tantalum oxide single layer deposited onto a Q1 substrate by means of the multi-oscillator-model. The results are again in good agreement with literature data.
引用
收藏
页码:28 / 32
页数:5
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