3-MASK SELF-ALIGNED MOS TECHNOLOGY

被引：0
|
作者：
MAI, CC [1 ]
CHAN, TC [1 ]
PALMER, RB [1 ]
机构：
[1] MOSTEK CORP,WORCESTER,MA 01606
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1973年 / ED20卷 / 12期
关键词：
D O I：
10.1109/T-ED.1973.17813
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1162 / 1164
页数：3
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