THE EFFECTS OF GAS-COMPOSITION ON DISCHARGE AND DEPOSITION CHARACTERISTICS WHEN MAGNETRON SPUTTERING ALUMINUM

被引：12
作者：
NYAIESH, AR
HOLLAND, L
机构：
来源：
VACUUM | 1981年 / 31卷 / 8-9期
关键词：
D O I：
10.1016/S0042-207X(81)80045-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：371 / 375
页数：5
相关论文
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