THERMOCHEMISTRY OF THERMAL PLASMA CHEMICAL-REACTIONS .2. A SURVEY OF SYNTHESIS ROUTES FOR SILICON-NITRIDE PRODUCTION

被引：22

作者：

CHANG, Y ^{[1
]}

YOUNG, RM ^{[1
]}

PFENDER, E ^{[1
]}

机构：

[1] UNIV MINNESOTA,CTR PLASMA CHEM,MINNEAPOLIS,MN 55455

来源：

关键词：

D O I：

10.1007/BF01016519

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：299 / 316

页数：18

共 25 条

[1] ABOAF JA, 1968, J ELECTROCHEM SOC, V116, P1092
[2] BOURDIN E, UNPUB
[3] CANTELOUP J, 1974, SPECIAL CERAMICS, V6, P209
[4] THERMOCHEMISTRY OF THERMAL PLASMA CHEMICAL-REACTIONS .1. GENERAL RULES FOR THE PREDICTION OF PRODUCTS
CHANG, Y
PFENDER, E
[J]. PLASMA CHEMISTRY AND PLASMA PROCESSING, 1987, 7 (03) : 275 - 297
[5] CHANG Y, 1986, THESIS U MINNESOTA
[6] HENRY A, 1975, SPECIAL CERAMICS, V6, P199
[7] HUSSAN T, 1985, 7TH P INT S PLASM CH, V1, P7
[8] INOUE H, 1975, J MATER SCI, V10, P1243
[9] JENNINGS HM, 1983, J MATER SCI, V19, P951
[10] KATO A, 1981, MEM FAC ENG KYNSKU U, V40, P319