IMPLANT DIFFUSION WITH POSITION-DEPENDENT DIFFUSION-COEFFICIENT

被引：11

作者：

COLLINS, R

机构：

来源：

RADIATION EFFECTS LETTERS | 1981年 / 58卷 / 05期

关键词：

D O I：

10.1080/01422448108229076

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：133 / 137

页数：5

共 12 条

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[2]

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[3]

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[4]

Crank J, 1975, WSEAS T SYST CONTROL

[5] ION-BEAM-INDUCED ATOMIC MIXING [J].

HAFF, PK ;

SWITKOWSKI, ZE .

[6]

LINDHARD J, 1971, MAT FYS MED DAN VID, V38, P8

[7] RECOIL MIXING IN SOLIDS BY ENERGETIC ION-BEAMS [J].

LITTMARK, U ;

HOFER, WO .

NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3) :329-342

[8] RECOIL MIXING IN HIGH-FLUENCE ION-IMPLANTATION [J].

LITTMARK, U ;

HOFER, WO .

NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3) :177-181

[9]

MATTESON S, UNPUBLISHED

[10]

MATTESON S, 1980, P ION BEAM MODIF MAT