COMPRESSIVE STRESS TRANSITION IN AL, V, ZR, NB AND W METAL-FILMS SPUTTERED AT LOW WORKING PRESSURES

被引：206
作者：
HOFFMAN, DW
THORNTON, JA
机构：
[1] FORD MOTOR CO,ENGN & RES STAFF,DEARBORN,MI 48121
[2] TELIC CORP,SANTA MONICA,CA 90404
来源：
THIN SOLID FILMS | 1977年 / 45卷 / 02期
关键词：
D O I：
10.1016/0040-6090(77)90276-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：387 / 396
页数：10
相关论文
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