PROPERTIES AND APPLICATIONS OF ION-IMPLANTED FILMS

被引：25
作者：
STEPHENS, KG
WILSON, IH
机构：
来源：
THIN SOLID FILMS | 1978年 / 50卷 / MAY期
关键词：
D O I：
10.1016/0040-6090(78)90119-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：325 / 347
页数：23
相关论文
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