COMPARATIVE-STUDY OF STRUCTURE OF EVAPORATED AND GLOW-DISCHARGE SILICON

被引:74
作者
BARNA, A
BARNA, PB
RADNOCZI, G
TOTH, L
THOMAS, P
机构
[1] HUNGARIAN ACAD SCI,TECH PHYS RES INST,H-1088 BUDAPEST,HUNGARY
[2] UNIV MARBURG,FACHBEREICH PHYS,D-3550 MARBURG,FED REP GER
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1977年 / 41卷 / 01期
关键词
D O I
10.1002/pssa.2210410107
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:81 / 84
页数:4
相关论文
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