PROXIMAL PROBE STUDY OF SELF-ASSEMBLED MONOLAYER RESIST MATERIALS

被引：52
作者：
PERKINS, FK
DOBISZ, EA
BRANDOW, SL
KOLOSKI, TS
CALVERT, JM
RHEE, KW
KOSAKOWSKI, JE
MARRIAN, CRK
机构：
[1] USN, RES LAB, CTR BIOMOLEC SCI & ENGN, OFF NAVAL TECHNOL, WASHINGTON, DC 20375 USA
[2] SFA INC, LANDOVER, MD 20785 USA
[3] USN, RES LAB, NANOELECTR PROC FACIL, WASHINGTON, DC 20375 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期
关键词：
D O I：
10.1116/1.587431
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：3725 / 3730
页数：6
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