THE INFLUENCE OF THE SUBSTRATE AND THE SUBSTRATE-TEMPERATURE ON THE CRYSTALLINITY OF TINFILMS

被引：4
|
作者：
PATEL, AR
RAO, KV
机构：
来源：
THIN SOLID FILMS | 1980年 / 70卷 / 02期
关键词：
D O I：
10.1016/0040-6090(80)90366-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：253 / 260
页数：8
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