SILICON MACH-ZEHNDER WAVE-GUIDE INTERFEROMETERS OPERATING AT 1.3 MU-M

被引:91
作者
TREYZ, GV
机构
[1] IBM Research, T. J. Watson Research Center, Yorktown Heights, New York 10598
关键词
MICROWAVE DEVICES AND COMPONENTS; INTERFEROMETERS;
D O I
10.1049/el:19910079
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Mach-Zehnder waveguide interferometers have been fabricated in silicon and operation has been demonstrated at lambda = 1.3-mu-m. The switching mechanism is based on the thermally induced variation of the refractive index of crystalline silicon. Modulation depths of 40% were obtained for switching powers of 30 mW and switching times of 50-mu-s.
引用
收藏
页码:118 / 120
页数:3
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