DEPENDENCE OF SPUTTERING COEFFICIENT ON ION DOSE

被引:25
作者
COLLIGON, JS [1 ]
PATEL, MH [1 ]
机构
[1] UNIV SALFORD,DEPT ELECT ENGN,SALFORD M5 4WT,LANCASHIRE,ENGLAND
来源
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1977年 / 32卷 / 3-4期
关键词
D O I
10.1080/00337577708233074
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
引用
收藏
页码:193 / 197
页数:5
相关论文
共 12 条
[1]   SPUTTERING EXPERIMENTS IN THE HIGH ENERGY REGION [J].
ALMEN, O ;
BRUCE, G .
NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02) :279-289
[2]   HEAVY-ION SPUTTERING YIELDS OF GOLD - FURTHER EVIDENCE OF NONLINEAR EFFECTS [J].
ANDERSEN, HH ;
BAY, HL .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (06) :2416-2422
[3]  
ANDERSEN HH, 1972, RADIAT EFF, V13, P67
[4]  
ARIFOV UA, 1961, INTERACTION ATOMIC P, P159
[5]  
COLLIGON JS, 1961, VACUUM, V11, P272
[6]  
COLLIGON JS, 1973, 1972 P INT C ION SUR, P77
[7]  
COLLIGON JS, 1970, 1969 P INT C AT COLL, P258
[8]   SPUTTERING OF AU BY 45-KEV IONS FOR DIFFERENT FLUENCES [J].
EERNISSE, EP .
APPLIED PHYSICS LETTERS, 1976, 29 (01) :14-17
[9]  
Hermanne N., 1973, Radiation Effects, V19, P161, DOI 10.1080/00337577308232237
[10]  
NELSON RS, 1973, ION SURFACE INTERACT, P199